TETRAKIS(DIETHYLAMINO)HAFNIUM CAS 19824-55-6

• Iden­ti­fi­ca­tion
• Prop­er­ties
• Safe­ty Data
• Spec­i­fi­ca­tions & Oth­er Information
• Links
• Quick Inquiry

Iden­ti­fi­ca­tion

CAS Number

19824-55-6

Name

TETRAKIS(DIETHY­LAMINO)HAFNI­UM

Syn­onyms

Ethanamine, N-eth­yl-, hafni­um salt (4:1) [ACD/​Index Name]
Hafni­um tetrakis(diethylazanide) [ACD/IUPAC Name]
Hafniumtetrakis(diethylazanid) [Ger­man] [ACD/IUPAC Name]
MFCD00799095 [MDL num­ber]
Tetrakis(diethylamido)hafnium(IV)
Tetrakis(diethylamino)hafnium
Tetrakis(diethylamino)hafnium(IV)
Tétrakis(diéthylazanide) d’hafnium [French] [ACD/IUPAC Name]
Ethanamine, N-eth­yl-, hafnium(4+) salt (4:1)
Ethanamine, N-ethyl-,hafnium(4+) salt (4:1)
HAFNI­UM DIETHY­LAMIDE
Hafni­um, tetrakis(diethylamino)-
Hafniumtetrakis(diethylazanid)
TDEAH

SMILES

CCN(CC)[Hf](N(CC)CC)(N(CC)CC)N(CC)CC

Std­InChI

InChI=1S/4C4H10N.Hf/​c41-3-5-4-2;/h43-4H2,1-2H3;/q4*-1;+4

Std­InChIKey

VBC­SQFQVDX­IO­JL-UHF­F­­FAOYSA-N

Mol­e­c­u­lar Formula

C₁₆H₄₀HfN₄

Mol­e­c­u­lar Weight

467.006

MDL Number

MFCD00799095

Prop­er­ties

Appear­ance

Yel­low liquid

Struc­ture

struc­ture of TETRAKIS(DIETHY­LAMINO)HAFNI­UM CAS 19824-55-6

Safe­ty Data

Sym­bol

GHS02, GHS07

Sig­nal Word

Warn­ing

Haz­ard statements

Pre­cau­tion­ary Statements

WGK Germany

3

MSDS Download

Spec­i­fi­ca­tions and Oth­er Infor­ma­tion of Our 

Iden­ti­fi­ca­tion Methods

NMR, MS

Puri­ty

99.99% min

Chlo­ride ion

≤10ppm

Shelf Life

1 year

Known Appli­ca­tion

TETRAKIS(DIETHY­LAMINO)HAFNI­UM CAS 19824-55-6 are fre­quent­ly used in thin film depo­si­tion, par­tic­u­lar­ly in the semi­con­duc­tor man­u­fac­tur­ing indus­try. They serve as pre­cur­sor mate­ri­als for thin film prepa­ra­tion, for exam­ple, in the fab­ri­ca­tion process­es of inte­grat­ed cir­cuits and oth­er elec­tron­ic devices.

Gen­er­al View of Documents

Links

This prod­uct is devel­oped by our R&D com­pa­ny Warshel Chem­i­cal Ltd (https://​www​.warshel​.com/).

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