Tris(dimethylamino)silane CAS 15112-89-7

• Iden­ti­fi­ca­tion
• Prop­er­ties
• Safe­ty Data
• Spec­i­fi­ca­tions & Oth­er Information
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Iden­ti­fi­ca­tion

CAS Number

15112-89-7

Name

Tris(dimethylamino)silane

Syn­onyms

(Me2N)3SiH
15112-89-7 [RN]
239-165-0 [EINECS]
MFCD00048006
N,N,N’,N’,N”, N”-Hexamethylsilanetriamine
N,N,N’,N’,N”,N”-Hexamethylsilanetriamine [ACD/IUPAC Name]
N,N,N’,N’,N”,N”-Hexaméthylsilanetriamine [French] [ACD/IUPAC Name]
N,N,N’,N’,N”,N”-Hexamethylsilantriamin [Ger­man] [ACD/IUPAC Name]
Silan­e­tri­amine, N,N,N’,N’,N”,N”-hexamethyl- [ACD/​Index Name]
TDMAS
Tris(dimethylamido)silane
Tris(dimethylamino)silane
VV5800000
[BIS(DIMETHY­LAMINO)SILYL]DIMETHY­LAMINE
3dmas : [(ch3)2n]3sih
99715-91-0 [RN]
N-[bis(dimethylamino)silyl]-N-methylmethanamine
Tris (dimethy­lamino ) silane
TRIS SILANE
tris(dimethylamino)silicon

SMILES

CN(C)[SiH](N(C)C)N(C)C

Std­InChI

InChI=1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

Std­InChIKey

TWVSWD­VJB­JK­­DAA-UHF­F­­FAOYSA-N

Mol­e­c­u­lar Formula

C₆H₁₉N₃Si

Mol­e­c­u­lar Weight

161.321

EINECS

239-165-0

MDL Number

MFCD00048006

Prop­er­ties

Appear­ance

Col­or­less liquid

Struc­ture

Struc­ture of Tris(dimethylamino)silane CAS 15112-89-7

Safe­ty Data

Sym­bol

GHS02,GHS05, GHS06

Sig­nal Word

Warn­ing

Haz­ard statements

Pre­cau­tion­ary Statements

WGK Germany

3

MSDS Download

Spec­i­fi­ca­tions and Oth­er Infor­ma­tion of Our 

Iden­ti­fi­ca­tion Methods

HNMR, HPLC

Puri­ty

99.9+%(99.9999%-si)

Met­al ion

<10ppb

Chlo­rine ion

<1ppm

Shelf Life

1 year

Stor­age

Under room tem­per­a­ture away from light

Pro­duc­tiv­i­ty

1MT/​month

Known Appli­ca­tion

Tris(dimethylamino)silane be used as a CVD pre­cur­sor mate­r­i­al for the depo­si­tion of thin film mate­ri­als such as sil­i­con oxide, sil­i­con nitride, and more. This is cru­cial in semi­con­duc­tor man­u­fac­tur­ing and thin-film coat­ing process­es. And serves as a pre­cur­sor for organosil­i­con poly­mers, which are used to cre­ate high-per­­for­­mance sil­i­cone mate­ri­als known for their excel­lent heat and chem­i­cal resis­tance. These mate­ri­als find appli­ca­tions in coat­ings, sealants, adhe­sives, and more.

Gen­er­al View of Documents

Links

This prod­uct is devel­oped by our R&D com­pa­ny Warshel Chem­i­cal Ltd (https://​www​.warshel​.com/).

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