TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3

• Iden­ti­fi­ca­tion
• Prop­er­ties
• Safe­ty Data
• Spec­i­fi­ca­tions & Oth­er Information
• Links
• Quick Inquiry

Iden­ti­fi­ca­tion

CAS Number

175923-04-3

Name

TETRAKIS(ETH­YL­METHY­LAMINO)ZIR­CO­NI­UM

Syn­onyms

Ethanamine, N-methyl-, zirconium(4+) salt (4:1) [ACD/​Index Name]

MFCD03427131 [MDL number]

Temaz [Trade name]

Tetrakis(ethylmethylamido)zirconium(IV)

Tetrakis(ethylmethylamino)zirconium(IV)

Tétrakis[éthyl(méthyl)azanide] de zirconium(4+) [French] [ACD/IUPAC Name]

Zirconium(4+) tetrakis[ethyl(methyl)azanide] [ACD/IUPAC Name]

Zirconium(4+)tetrakis[ethyl(methyl)azanid] [Ger­man] [ACD/IUPAC Name]

ETH­YL(METHYL){TRIS[ETH­YL(METHYL)AMINO]ZIR­CO­NIO}AMINE

temaz : zr[n(ch3)(ch2ch3)]4

TETRAKIS ZIR­CO­NI­UM

Tetrakis(ethylmethylamino)zirconium

ZIR­CO­NI­UM TETRAKIS(ETH­YL­METHY­LAMIDE)

Zirconium(4+)tetrakis[ethyl(methyl)azanid]

SMILES

CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC

Std­InChI

InChI=1S/4C3H8N.Zr/​c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4

Std­InChIKey

SRL­­SISLWUN­­ZOOB-UHF­F­­FAOYSA-N

Mol­e­c­u­lar Formula

C₁₂H₃₂N₄Zr

Mol­e­c­u­lar Weight

323.633

MDL Number

MFCD03427131

Prop­er­ties

Appear­ance

Col­or­less to yel­low liquid

Struc­ture

Struc­ture of TETRAKIS(ETH­YL­METHY­LAMINO)ZIR­CO­NI­UM CAS 175923-04-3

Safe­ty Data

Sym­bol

GHS02, GHS07

Sig­nal Word

Warn­ing

Haz­ard statements

Pre­cau­tion­ary Statements

WGK Germany

3

MSDS Download

Spec­i­fi­ca­tions and Oth­er Infor­ma­tion of Our 

Iden­ti­fi­ca­tion Methods

MS

Puri­ty

99.99% min

Chlo­ride ion

≤10ppm

Shelf Life

1 year

Known Appli­ca­tion

TETRAKIS(ETH­YL­METHY­LAMINO)ZIR­CO­NI­UM CAS 175923-04-3 may be used as a met­al-organ­ic pre­cur­sor for thin film depo­si­tion in semi­con­duc­tor man­u­fac­tur­ing. It serves as a source of zir­co­ni­um for the prepa­ra­tion of thin film coat­ings, such as in the fab­ri­ca­tion of inte­grat­ed cir­cuits and oth­er elec­tron­ic devices.

Gen­er­al View of Documents

Links

This prod­uct is devel­oped by our R&D com­pa­ny Warshel Chem­i­cal Ltd (https://​www​.warshel​.com/).

Quick Inquiry

Fill out our inquiry form and one of our experts will be in touch with you shortly.