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Identification
CAS Number
7664-38-2
Name
Phosphoric acid
Synonyms
1921286 [Beilstein]
231-633-2 [EINECS]
7664-38-2 [RN]
Acide phosphorique [French] [ACD/IUPAC Name]
Acido fosforico [Spanish]
Acido fosforico [Italian]
Acidum phosphoricum [Latin]
Fosforzuuroplossingen [Dutch]
K-etchant
MFCD00011340 [MDL number]
Mikro Klene DF [Trade name]
o-phosphoric acid
orthophosphoric acid
Phosphoric acid [ACD/Index Name] [ACD/IUPAC Name] [Wiki]
Phosphorosäure [German]
Phosphorsäure [German] [ACD/IUPAC Name]
Ultra-Etch Gel [Trade name]
2HP
2PO
44607-13-8 secondary RN [RN]
5GP
A3P
Acido fosforico
ACS
adenosine-3′-5′-diphosphate
Antisal 4
BMDB
Dihydrogen phosphate [ACD/IUPAC Name]
DIHYDROGENPHOSPHATE ION
Dri-Tri
Fosforzuuroplossingen
hmdb
http://www.hmdb.ca/metabolites/HMDB0001429
http://www.hmdb.ca/metabolites/HMDB0002142
Hydrogen orthophosphate
InChI=1S/H3O4P/c1-5(2,3)4/h(H3,1,2,3,4)
Kefo
Marphos
mxiJ protein
NFB
Oleth-4 phosphate
O-Phosphoethanolamine
Ortho- phosphoric acid
ortho-phosphoric acid
PEE
PHOSPHATE ION
phosphate, dihydrogen
PHOSPHITE ION
Phospholeum
phosphomannan
Phosphonate [ACD/IUPAC Name] [Wiki]
Phosphonic acid [ACD/Index Name] [ACD/IUPAC Name]
phosphorate
Phosphoric acid, (ortho)
Phosphoric acid, ortho-
phosphoricacid
Phosphorsaeure [German]
Phosphorsaeure
Phosphorsaeureloesungen [German]
Phosphorsaeureloesungen
PHS
POP
PPV
PSE
PX4
pyrophosphate
PYROPHOSPHATE 2-
Sitagliptin Phosphate [USAN]
Sonac
Superphosphoric acid
tetrahydroxyphosphanium
Tetrahydroxyphosphonium [ACD/IUPAC Name]
tetraoxophosphoric acid
THYMIDINE-5′-TRIPHOSPHATE
trihydroxidooxidophosphorus
Tromete
TTP
U5P
URIDINE-5′-MONOPHOSPHATE
Wc-reiniger
SMILES
OP(=O)(O)O
StdInChI
InChI=1S/H3O4P/c1-5(2,3)4/h(H3,1,2,3,4)
StdInChIKey
NBIIXXVUZAFLBC-UHFFFAOYSA-N
Molecular Formula
H3PO4
Molecular Weight
98.00
Beilstein/REAXYS Number
1921286
EINECS
233-343-1
MDL number
MFCD00011340
Properties
Appearance
Colorless and transparent or slightly colored mesh liquid
Safety Data
Signal word
Danger
Personal Protective Equipment
Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
RIDADR
UN 1805 8 / PGIII
WGK Germany
1
Specifications and Other Information of Our Phosphoric acid CAS 7664-38-2
Detailed specification
| Indicator | LCD grade | IC grade |
| H3PO4 | 85-87% | 85-87% |
| H3PO3 | ≤0.005% | ≤0.005% |
| NO3 | ≤5mg/kg | ≤5mg/kg |
| SO4 | ≤10mg/kg | ≤10mg/kg |
| Cl | ≤1mg/kg | ≤0.5mg/kg |
| Al | ≤200µg/kg | ≤50µg/kg |
| B | / | ≤50µg/kg |
| Sb | ≤3000µg/kg | ≤300µg/kg |
| As | ≤100µg/kg | ≤20µg/kg |
| Ba | ≤100µg/kg | ≤20µg/kg |
| Cd | ≤100µg/kg | ≤20µg/kg |
| Ca | ≤1000µg/kg | ≤50µg/kg |
| Cr | ≤100µg/kg | ≤20µg/kg |
| Co | ≤100µg/kg | ≤20µg/kg |
| Cu | ≤50µg/kg | ≤20µg/kg |
| Ga | ≤1000µg/kg | ≤50µg/kg |
| Au | ≤100µg/kg | ≤20µg/kg |
| Fe | ≤300µg/kg | ≤20µg/kg |
| Pb | ≤100µg/kg | ≤20µg/kg |
| Li | ≤100µg/kg | ≤10µg/kg |
| Mg | ≤100µg/kg | ≤20µg/kg |
| Mn | ≤100µg/kg | ≤20µg/kg |
| Ni | ≤100µg/kg | ≤20µg/kg |
| K | ≤100µg/kg | ≤20µg/kg |
| Ag | ≤100µg/kg | ≤20µg/kg |
| Na | ≤500µg/kg | ≤50µg/kg |
| Sn | / | ≤10µg/kg |
| Sr | ≤100µg/kg | ≤20µg/kg |
| Ti | ≤100µg/kg | ≤50µg/kg |
| Zn | ≤100µg/kg | ≤50µg/kg |
| Granule | / | / |
Storage
Under room temperature away from light
Packing
330kg or IBC drum, ISO Tank.
Known Application
Widely used in VLSI, thin film liquid crystal display and other microelectronic industries, mainly used for wet cleaning and wet etching of chips.
